Design, Modeling, and Fabrication of High-Speed VCSEL with Data Rate up to 50 Gb/s

We have studied the characteristics of frequency response at 850-nm GaAs high-speed vertical-cavity surface-emitting lasers (VCSELs) with different kinds of oxide aperture sizes and cavity length using the PICS3D simulation program. Using 5-μm oxide aperture sizes, the frequency response behavior ca...

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Detalles Bibliográficos
Autores principales: Shen, Chih-Chiang, Hsu, Tsung-Chi, Yeh, Yen-Wei, Kang, Chieh-Yu, Lu, Yun-Ting, Lin, Hon-Way, Tseng, Hsien-Yao, Chen, Yu-Tzu, Chen, Cheng-Yuan, Lin, Chien-Chung, Wu, Chao-Hsin, Lee, Po-Tsung, Sheng, Yang, Chiu, Ching-Hsueh, Kuo, Hao-Chung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2019
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6694349/
https://www.ncbi.nlm.nih.gov/pubmed/31414236
http://dx.doi.org/10.1186/s11671-019-3107-7
Descripción
Sumario:We have studied the characteristics of frequency response at 850-nm GaAs high-speed vertical-cavity surface-emitting lasers (VCSELs) with different kinds of oxide aperture sizes and cavity length using the PICS3D simulation program. Using 5-μm oxide aperture sizes, the frequency response behavior can be improved from 18.4 GHz and 15.5 GHz to 21.2 GHz and 19 GHz in a maximum of 3 dB at 25 °C and 85 °C, respectively. Numerical simulation results also suggest that the frequency response performances improved from 21.2 GHz and 19 GHz to 30.5 GHz and 24.5 GHz in a maximum of 3 dB at 25 °C and 85 °C due to the reduction of cavity length from 3λ/2 to λ/2. Consequently, the high-speed VCSEL devices were fabricated on a modified structure and exhibited 50-Gb/s data rate at 85 °C.

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