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Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing
In this paper, we propose a novel vertical SU-8 waveguide for evanescent analyte sensing. The waveguide is designed to possess a vertical and narrow structure to generate evanescent waves on both sides of the waveguide’s surface, aimed at increasing the sensitivity by enlarging the sensing areas. We...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6695900/ https://www.ncbi.nlm.nih.gov/pubmed/31374960 http://dx.doi.org/10.3390/s19153383 |
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author | Xin, Yu Pandraud, Gregory Zhang, Yongmeng French, Paddy |
author_facet | Xin, Yu Pandraud, Gregory Zhang, Yongmeng French, Paddy |
author_sort | Xin, Yu |
collection | PubMed |
description | In this paper, we propose a novel vertical SU-8 waveguide for evanescent analyte sensing. The waveguide is designed to possess a vertical and narrow structure to generate evanescent waves on both sides of the waveguide’s surface, aimed at increasing the sensitivity by enlarging the sensing areas. We performed simulations to monitor the influence of different parameters on the waveguide’s performance, including its height and width. E-beam lithography was used to fabricate the structure, as this one-step direct writing process enables easy, fast, and high-resolution fabrication. Furthermore, it reduces the sidewall roughness and decreases the induced scattering loss, which is a major source of waveguide loss. Couplers were added to improve the coupling efficiency and alignment tolerance, and will contribute to the feasibility of a plug-and-play optical system. Optical measurements show that the transmission loss is 1.03 ± 0.19 dB/cm. The absorption sensitivity was measured to be 4.8 dB per refractive index unit (dB/RIU) for saline solutions with various concentrations. |
format | Online Article Text |
id | pubmed-6695900 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-66959002019-09-05 Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing Xin, Yu Pandraud, Gregory Zhang, Yongmeng French, Paddy Sensors (Basel) Article In this paper, we propose a novel vertical SU-8 waveguide for evanescent analyte sensing. The waveguide is designed to possess a vertical and narrow structure to generate evanescent waves on both sides of the waveguide’s surface, aimed at increasing the sensitivity by enlarging the sensing areas. We performed simulations to monitor the influence of different parameters on the waveguide’s performance, including its height and width. E-beam lithography was used to fabricate the structure, as this one-step direct writing process enables easy, fast, and high-resolution fabrication. Furthermore, it reduces the sidewall roughness and decreases the induced scattering loss, which is a major source of waveguide loss. Couplers were added to improve the coupling efficiency and alignment tolerance, and will contribute to the feasibility of a plug-and-play optical system. Optical measurements show that the transmission loss is 1.03 ± 0.19 dB/cm. The absorption sensitivity was measured to be 4.8 dB per refractive index unit (dB/RIU) for saline solutions with various concentrations. MDPI 2019-08-01 /pmc/articles/PMC6695900/ /pubmed/31374960 http://dx.doi.org/10.3390/s19153383 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Xin, Yu Pandraud, Gregory Zhang, Yongmeng French, Paddy Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing |
title | Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing |
title_full | Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing |
title_fullStr | Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing |
title_full_unstemmed | Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing |
title_short | Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing |
title_sort | single-mode tapered vertical su-8 waveguide fabricated by e-beam lithography for analyte sensing |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6695900/ https://www.ncbi.nlm.nih.gov/pubmed/31374960 http://dx.doi.org/10.3390/s19153383 |
work_keys_str_mv | AT xinyu singlemodetaperedverticalsu8waveguidefabricatedbyebeamlithographyforanalytesensing AT pandraudgregory singlemodetaperedverticalsu8waveguidefabricatedbyebeamlithographyforanalytesensing AT zhangyongmeng singlemodetaperedverticalsu8waveguidefabricatedbyebeamlithographyforanalytesensing AT frenchpaddy singlemodetaperedverticalsu8waveguidefabricatedbyebeamlithographyforanalytesensing |