Scaled-Down c-Si and c-SiGe Wagon-Wheels for the Visualization of the Anisotropy and Selectivity of Wet-Chemical Etchants

Wet etching offers an advantage as a soft, damage-less method to remove sacrificial material with close to nanometer precision which has become critical for the fabrication of nanoscale structures. In order to develop such wet etching solutions, screening of etchant properties like selectivity and (...

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Detalles Bibliográficos
Autores principales: Pacco, Antoine, Tao, Zheng, Rip, Jens, van Dorp, Dennis, Philipsen, Harold, Holsteyns, Frank
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2019
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6701794/
https://www.ncbi.nlm.nih.gov/pubmed/31428955
http://dx.doi.org/10.1186/s11671-019-3114-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6701794/
https://www.ncbi.nlm.nih.gov/pubmed/31428955
http://dx.doi.org/10.1186/s11671-019-3114-8

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