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Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm

Chromatic confocal technology (CCT) is one of the most promising methods for the contactless and accurate measurement of structure profiles. Based on the principles of chromatic dispersion and confocal theory, a dispersion probe is proposed and optimized with several commercial and cheap refractive...

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Detalles Bibliográficos
Autores principales: Bai, Jiao, Li, Xinghui, Wang, Xiaohao, Zhou, Qian, Ni, Kai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6719189/
https://www.ncbi.nlm.nih.gov/pubmed/31426566
http://dx.doi.org/10.3390/s19163592
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author Bai, Jiao
Li, Xinghui
Wang, Xiaohao
Zhou, Qian
Ni, Kai
author_facet Bai, Jiao
Li, Xinghui
Wang, Xiaohao
Zhou, Qian
Ni, Kai
author_sort Bai, Jiao
collection PubMed
description Chromatic confocal technology (CCT) is one of the most promising methods for the contactless and accurate measurement of structure profiles. Based on the principles of chromatic dispersion and confocal theory, a dispersion probe is proposed and optimized with several commercial and cheap refractive index lenses. The probe provides 0.3× magnification and a dispersion range of 400 μm with a commercial LED source with an effective bandwidth of ca. 450–623 nm. Since the noise fluctuation can affect the extraction stability of the focal wavelength, a modification to the centroid peak extraction algorithm is proposed in this paper, where several virtual pixels are interpolated among the real pixels of the spectrometer before thresholding. In addition, a series of experiments were carried out to test the system’s displacement measurement performance. The results clearly show that stability is improved by the modified algorithm, and the calibration repeatability is ±0.3 μm in the full measurement range with a linear stage. The standard deviation at the fixed position has an optimal value of 0.009 μm. The section profile of a Fresnel lens is measured by the CCT system to demonstrate its high feasibility and efficiency.
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spelling pubmed-67191892019-09-10 Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm Bai, Jiao Li, Xinghui Wang, Xiaohao Zhou, Qian Ni, Kai Sensors (Basel) Article Chromatic confocal technology (CCT) is one of the most promising methods for the contactless and accurate measurement of structure profiles. Based on the principles of chromatic dispersion and confocal theory, a dispersion probe is proposed and optimized with several commercial and cheap refractive index lenses. The probe provides 0.3× magnification and a dispersion range of 400 μm with a commercial LED source with an effective bandwidth of ca. 450–623 nm. Since the noise fluctuation can affect the extraction stability of the focal wavelength, a modification to the centroid peak extraction algorithm is proposed in this paper, where several virtual pixels are interpolated among the real pixels of the spectrometer before thresholding. In addition, a series of experiments were carried out to test the system’s displacement measurement performance. The results clearly show that stability is improved by the modified algorithm, and the calibration repeatability is ±0.3 μm in the full measurement range with a linear stage. The standard deviation at the fixed position has an optimal value of 0.009 μm. The section profile of a Fresnel lens is measured by the CCT system to demonstrate its high feasibility and efficiency. MDPI 2019-08-18 /pmc/articles/PMC6719189/ /pubmed/31426566 http://dx.doi.org/10.3390/s19163592 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Bai, Jiao
Li, Xinghui
Wang, Xiaohao
Zhou, Qian
Ni, Kai
Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm
title Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm
title_full Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm
title_fullStr Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm
title_full_unstemmed Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm
title_short Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm
title_sort chromatic confocal displacement sensor with optimized dispersion probe and modified centroid peak extraction algorithm
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6719189/
https://www.ncbi.nlm.nih.gov/pubmed/31426566
http://dx.doi.org/10.3390/s19163592
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