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FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout

This paper reports on a design and simulation study aiming at high-accuracy 2D micromachined thermal flow transducers. The scope is restricted to micromachined devices featuring a square-shaped membrane incorporating central symmetric thin-film devices. A microthermistor array probed spatial excess...

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Autores principales: Talic, Almir, Cerimovic, Samir, Beigelbeck, Roman, Kohl, Franz, Sauter, Thilo, Keplinger, Franz
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6720222/
https://www.ncbi.nlm.nih.gov/pubmed/31443277
http://dx.doi.org/10.3390/s19163561
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author Talic, Almir
Cerimovic, Samir
Beigelbeck, Roman
Kohl, Franz
Sauter, Thilo
Keplinger, Franz
author_facet Talic, Almir
Cerimovic, Samir
Beigelbeck, Roman
Kohl, Franz
Sauter, Thilo
Keplinger, Franz
author_sort Talic, Almir
collection PubMed
description This paper reports on a design and simulation study aiming at high-accuracy 2D micromachined thermal flow transducers. The scope is restricted to micromachined devices featuring a square-shaped membrane incorporating central symmetric thin-film devices. A microthermistor array probed spatial excess temperature variations while the main heat supply was alternatively established by optional heating resistors or by pronounced self-heating of the thermistor devices. Proper device designs enable leading edge transducer performance without sophisticated signal conditioning schemes. We found that a high azimuthal uniformity of flow magnitude transduction is tantamount to a precise azimuthal accuracy. The most advanced result gave a maximum azimuthal aberration of 0.17 and 1.7 degrees for 1 m/s and 10 m/s, respectively, while the corresponding magnitude uniformity amounted to 0.07% and 0.5%. Such excellent specifications exceed the need of ordinary meteorological applications by far. However, they are essential for, e.g., precise non-contact measurements of 2D relative movements of two quasi-planar surfaces via the related Couette flow in intermediate air gaps. The simulations predicted significantly better device characteristics than achieved by us in first experiments. However, this gap could be attributed to imperfect control of the flow velocity field by the measurement setup.
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spelling pubmed-67202222019-10-30 FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout Talic, Almir Cerimovic, Samir Beigelbeck, Roman Kohl, Franz Sauter, Thilo Keplinger, Franz Sensors (Basel) Article This paper reports on a design and simulation study aiming at high-accuracy 2D micromachined thermal flow transducers. The scope is restricted to micromachined devices featuring a square-shaped membrane incorporating central symmetric thin-film devices. A microthermistor array probed spatial excess temperature variations while the main heat supply was alternatively established by optional heating resistors or by pronounced self-heating of the thermistor devices. Proper device designs enable leading edge transducer performance without sophisticated signal conditioning schemes. We found that a high azimuthal uniformity of flow magnitude transduction is tantamount to a precise azimuthal accuracy. The most advanced result gave a maximum azimuthal aberration of 0.17 and 1.7 degrees for 1 m/s and 10 m/s, respectively, while the corresponding magnitude uniformity amounted to 0.07% and 0.5%. Such excellent specifications exceed the need of ordinary meteorological applications by far. However, they are essential for, e.g., precise non-contact measurements of 2D relative movements of two quasi-planar surfaces via the related Couette flow in intermediate air gaps. The simulations predicted significantly better device characteristics than achieved by us in first experiments. However, this gap could be attributed to imperfect control of the flow velocity field by the measurement setup. MDPI 2019-08-15 /pmc/articles/PMC6720222/ /pubmed/31443277 http://dx.doi.org/10.3390/s19163561 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Talic, Almir
Cerimovic, Samir
Beigelbeck, Roman
Kohl, Franz
Sauter, Thilo
Keplinger, Franz
FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout
title FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout
title_full FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout
title_fullStr FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout
title_full_unstemmed FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout
title_short FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout
title_sort fem-analysis of 2d micromachined flow transduers based on age-thermistor arrays and a double bridge readout
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6720222/
https://www.ncbi.nlm.nih.gov/pubmed/31443277
http://dx.doi.org/10.3390/s19163561
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