FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout

This paper reports on a design and simulation study aiming at high-accuracy 2D micromachined thermal flow transducers. The scope is restricted to micromachined devices featuring a square-shaped membrane incorporating central symmetric thin-film devices. A microthermistor array probed spatial excess...

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Detalles Bibliográficos
Autores principales: Talic, Almir, Cerimovic, Samir, Beigelbeck, Roman, Kohl, Franz, Sauter, Thilo, Keplinger, Franz
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6720222/
https://www.ncbi.nlm.nih.gov/pubmed/31443277
http://dx.doi.org/10.3390/s19163561

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6720222/
https://www.ncbi.nlm.nih.gov/pubmed/31443277
http://dx.doi.org/10.3390/s19163561

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