Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen

A Pd-Ni alloy thin-film coated surface acoustic wave (SAW) device is proposed for sensing hydrogen. The Pd-Ni thin-film was sputtered onto the SAW propagation path of a SAW device with a delay line pattern to build the chip-sized hydrogen sensor. The prepared sensor chip was characterized by employi...

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Detalles Bibliográficos
Autores principales: Wang, Wen, Liu, Xueli, Mei, Shengchao, Liu, Mengwei, Lu, Chao, Lu, Minghui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6721225/
https://www.ncbi.nlm.nih.gov/pubmed/31443271
http://dx.doi.org/10.3390/s19163560
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author Wang, Wen
Liu, Xueli
Mei, Shengchao
Liu, Mengwei
Lu, Chao
Lu, Minghui
author_facet Wang, Wen
Liu, Xueli
Mei, Shengchao
Liu, Mengwei
Lu, Chao
Lu, Minghui
author_sort Wang, Wen
collection PubMed
description A Pd-Ni alloy thin-film coated surface acoustic wave (SAW) device is proposed for sensing hydrogen. The Pd-Ni thin-film was sputtered onto the SAW propagation path of a SAW device with a delay line pattern to build the chip-sized hydrogen sensor. The prepared sensor chip was characterized by employing a differential oscillation loop. The effect of the Pd-Ni film thickness on sensing performance was also evaluated, and optimal parameters were determined, allowing for fast response and high sensitivity. Excellent working stability (detection error of 3.7% in half a year), high sensitivity (21.3 kHz/%), and fast response (less than 10 s) were achieved from the 40 nm Pd-Ni alloy thin-film coated sensing device.
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spelling pubmed-67212252019-09-10 Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen Wang, Wen Liu, Xueli Mei, Shengchao Liu, Mengwei Lu, Chao Lu, Minghui Sensors (Basel) Article A Pd-Ni alloy thin-film coated surface acoustic wave (SAW) device is proposed for sensing hydrogen. The Pd-Ni thin-film was sputtered onto the SAW propagation path of a SAW device with a delay line pattern to build the chip-sized hydrogen sensor. The prepared sensor chip was characterized by employing a differential oscillation loop. The effect of the Pd-Ni film thickness on sensing performance was also evaluated, and optimal parameters were determined, allowing for fast response and high sensitivity. Excellent working stability (detection error of 3.7% in half a year), high sensitivity (21.3 kHz/%), and fast response (less than 10 s) were achieved from the 40 nm Pd-Ni alloy thin-film coated sensing device. MDPI 2019-08-15 /pmc/articles/PMC6721225/ /pubmed/31443271 http://dx.doi.org/10.3390/s19163560 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Wang, Wen
Liu, Xueli
Mei, Shengchao
Liu, Mengwei
Lu, Chao
Lu, Minghui
Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen
title Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen
title_full Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen
title_fullStr Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen
title_full_unstemmed Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen
title_short Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen
title_sort development of a high stability pd-ni alloy thin-film coated saw device for sensing hydrogen
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6721225/
https://www.ncbi.nlm.nih.gov/pubmed/31443271
http://dx.doi.org/10.3390/s19163560
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