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Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen

A Pd-Ni alloy thin-film coated surface acoustic wave (SAW) device is proposed for sensing hydrogen. The Pd-Ni thin-film was sputtered onto the SAW propagation path of a SAW device with a delay line pattern to build the chip-sized hydrogen sensor. The prepared sensor chip was characterized by employi...

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Detalles Bibliográficos
Autores principales:	Wang, Wen, Liu, Xueli, Mei, Shengchao, Liu, Mengwei, Lu, Chao, Lu, Minghui
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6721225/ https://www.ncbi.nlm.nih.gov/pubmed/31443271 http://dx.doi.org/10.3390/s19163560

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