Cargando…
Selective Carbon Material Engineering for Improved MEMS and NEMS
The development of micro and nano electromechanical systems and achievement of higher performances with increased quality and life time is confronted to searching and mastering of material with superior properties and quality. Those can affect many aspects of the MEMS, NEMS and MOMS design including...
| Autor principal: | |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723477/ https://www.ncbi.nlm.nih.gov/pubmed/31426401 http://dx.doi.org/10.3390/mi10080539 |