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Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens

The electromagnetic (EM) properties of metasurfaces depend on both structural design and material properties. microelectromechanical systems (MEMS) technology offers an approach for tuning metasurface EM properties by structural reconfiguration. In the past 10 years, vast applications have been demo...

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Detalles Bibliográficos
Autores principales: He, Shaowei, Yang, Huimin, Jiang, Yunhui, Deng, Wenjun, Zhu, Weiming
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723974/
https://www.ncbi.nlm.nih.gov/pubmed/31370137
http://dx.doi.org/10.3390/mi10080505
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author He, Shaowei
Yang, Huimin
Jiang, Yunhui
Deng, Wenjun
Zhu, Weiming
author_facet He, Shaowei
Yang, Huimin
Jiang, Yunhui
Deng, Wenjun
Zhu, Weiming
author_sort He, Shaowei
collection PubMed
description The electromagnetic (EM) properties of metasurfaces depend on both structural design and material properties. microelectromechanical systems (MEMS) technology offers an approach for tuning metasurface EM properties by structural reconfiguration. In the past 10 years, vast applications have been demonstrated based on MEMS metasurfaces, which proved to have merits including, large tunability, fast speed, small size, light weight, capability of dense integration, and compatibility of cost-effective fabrication process. Here, recent advances in MEMS metasurface applications are reviewed and categorized based on the tuning mechanisms, operation band and tuning speed. As an example, the pros and cons of MEMS metasurfaces for tunable lens applications are discussed and compared with traditional tunable lens technologies followed by the summary and outlook.
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spelling pubmed-67239742019-09-10 Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens He, Shaowei Yang, Huimin Jiang, Yunhui Deng, Wenjun Zhu, Weiming Micromachines (Basel) Review The electromagnetic (EM) properties of metasurfaces depend on both structural design and material properties. microelectromechanical systems (MEMS) technology offers an approach for tuning metasurface EM properties by structural reconfiguration. In the past 10 years, vast applications have been demonstrated based on MEMS metasurfaces, which proved to have merits including, large tunability, fast speed, small size, light weight, capability of dense integration, and compatibility of cost-effective fabrication process. Here, recent advances in MEMS metasurface applications are reviewed and categorized based on the tuning mechanisms, operation band and tuning speed. As an example, the pros and cons of MEMS metasurfaces for tunable lens applications are discussed and compared with traditional tunable lens technologies followed by the summary and outlook. MDPI 2019-07-31 /pmc/articles/PMC6723974/ /pubmed/31370137 http://dx.doi.org/10.3390/mi10080505 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Review
He, Shaowei
Yang, Huimin
Jiang, Yunhui
Deng, Wenjun
Zhu, Weiming
Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens
title Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens
title_full Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens
title_fullStr Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens
title_full_unstemmed Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens
title_short Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens
title_sort recent advances in mems metasurfaces and their applications on tunable lens
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723974/
https://www.ncbi.nlm.nih.gov/pubmed/31370137
http://dx.doi.org/10.3390/mi10080505
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