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Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens
The electromagnetic (EM) properties of metasurfaces depend on both structural design and material properties. microelectromechanical systems (MEMS) technology offers an approach for tuning metasurface EM properties by structural reconfiguration. In the past 10 years, vast applications have been demo...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723974/ https://www.ncbi.nlm.nih.gov/pubmed/31370137 http://dx.doi.org/10.3390/mi10080505 |
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author | He, Shaowei Yang, Huimin Jiang, Yunhui Deng, Wenjun Zhu, Weiming |
author_facet | He, Shaowei Yang, Huimin Jiang, Yunhui Deng, Wenjun Zhu, Weiming |
author_sort | He, Shaowei |
collection | PubMed |
description | The electromagnetic (EM) properties of metasurfaces depend on both structural design and material properties. microelectromechanical systems (MEMS) technology offers an approach for tuning metasurface EM properties by structural reconfiguration. In the past 10 years, vast applications have been demonstrated based on MEMS metasurfaces, which proved to have merits including, large tunability, fast speed, small size, light weight, capability of dense integration, and compatibility of cost-effective fabrication process. Here, recent advances in MEMS metasurface applications are reviewed and categorized based on the tuning mechanisms, operation band and tuning speed. As an example, the pros and cons of MEMS metasurfaces for tunable lens applications are discussed and compared with traditional tunable lens technologies followed by the summary and outlook. |
format | Online Article Text |
id | pubmed-6723974 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-67239742019-09-10 Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens He, Shaowei Yang, Huimin Jiang, Yunhui Deng, Wenjun Zhu, Weiming Micromachines (Basel) Review The electromagnetic (EM) properties of metasurfaces depend on both structural design and material properties. microelectromechanical systems (MEMS) technology offers an approach for tuning metasurface EM properties by structural reconfiguration. In the past 10 years, vast applications have been demonstrated based on MEMS metasurfaces, which proved to have merits including, large tunability, fast speed, small size, light weight, capability of dense integration, and compatibility of cost-effective fabrication process. Here, recent advances in MEMS metasurface applications are reviewed and categorized based on the tuning mechanisms, operation band and tuning speed. As an example, the pros and cons of MEMS metasurfaces for tunable lens applications are discussed and compared with traditional tunable lens technologies followed by the summary and outlook. MDPI 2019-07-31 /pmc/articles/PMC6723974/ /pubmed/31370137 http://dx.doi.org/10.3390/mi10080505 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Review He, Shaowei Yang, Huimin Jiang, Yunhui Deng, Wenjun Zhu, Weiming Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens |
title | Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens |
title_full | Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens |
title_fullStr | Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens |
title_full_unstemmed | Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens |
title_short | Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens |
title_sort | recent advances in mems metasurfaces and their applications on tunable lens |
topic | Review |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723974/ https://www.ncbi.nlm.nih.gov/pubmed/31370137 http://dx.doi.org/10.3390/mi10080505 |
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