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Mo-La(2)O(3) Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices
Developing advanced thin film materials is the key challenge in high-temperature applications of surface acoustic wave sensor devices. One hundred nanometer thick (Mo-La [Formula: see text] O [Formula: see text]) multilayer systems were fabricated at room temperature on thermally oxidized (100) Si s...
Autores principales: | Menzel, Siegfried B., Seifert, Marietta, Priyadarshi, Abhinav, Rane, Gayatri K., Park, Eunmi, Oswald, Steffen, Gemming, Thomas |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6747606/ https://www.ncbi.nlm.nih.gov/pubmed/31438479 http://dx.doi.org/10.3390/ma12172651 |
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