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Evolution of the Internal Structure of Short-Period Cr/V Multilayers with Different Vanadium Layers Thicknesses

Cr/V multilayer mirrors are suitable for applications in the “water window” spectral ranges. To study factors influencing the internal microstructure of Cr/V multilayers, multilayers with different vanadium layers thicknesses varying from 0.6 nm to 4.0 nm, and a fixed thickness (1.3 nm) of chromium...

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Detalles Bibliográficos
Autores principales: Qi, Runze, Huang, Qiushi, Fei, Jiani, Kozhevnikov, Igor V., Liu, Yang, Li, Pin, Zhang, Zhong, Wang, Zhanshan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6766248/
https://www.ncbi.nlm.nih.gov/pubmed/31514331
http://dx.doi.org/10.3390/ma12182936
Descripción
Sumario:Cr/V multilayer mirrors are suitable for applications in the “water window” spectral ranges. To study factors influencing the internal microstructure of Cr/V multilayers, multilayers with different vanadium layers thicknesses varying from 0.6 nm to 4.0 nm, and a fixed thickness (1.3 nm) of chromium layers, were fabricated and characterized with a set of experimental techniques. The average interface width characterizing a cumulative effect of different structure irregularities was demonstrated to exhibit non-monotonous dependence on the V layer thickness and achieve a minimal value of 0.31 nm when the thickness of the V layers was 1.2 nm. The discontinuous growth of very thin V films increased in roughness as the thickness of V layers decreased. The columnar growth of the polycrystalline grains in both materials became more pronounced with increasing thickness, resulting in a continuous increase in the interface width to a maximum of 0.9 nm for a 4 nm thickness of the V layer.