Multilayer Thickness Measurements below the Rayleigh Limit Using FMCW Millimeter and Terahertz Waves

We present thickness measurements with millimeter and terahertz waves using frequency-modulated continuous-wave (FMCW) sensors. In contrast to terahertz time-domain spectroscopy (TDS), our FMCW systems provide a higher penetration depth and measurement rates of several kilohertz at frequency modulat...

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Detalles Bibliográficos
Autores principales: Schreiner, Nina S., Sauer-Greff, Wolfgang, Urbansky, Ralph, von Freymann, Georg, Friederich, Fabian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6767092/
https://www.ncbi.nlm.nih.gov/pubmed/31514296
http://dx.doi.org/10.3390/s19183910

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