Microelectromechanical System-Based Electrochemical Seismometers with Two Pairs of Electrodes Integrated on One Chip

This paper presents microelectromechanical system (MEMS)-based electrochemical seismometers with two pairs of electrodes integrated on one chip. Both theoretical analysis and numerical simulations were conducted to reveal the working principle of the proposed electrochemical seismometers, finding th...

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Detalles Bibliográficos
Autores principales: Zheng, Xichen, Chen, Deyong, Wang, Junbo, Chen, Jian, Xu, Chao, Qi, Wenjie, Liu, Bowen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6767337/
https://www.ncbi.nlm.nih.gov/pubmed/31540211
http://dx.doi.org/10.3390/s19183953

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6767337/
https://www.ncbi.nlm.nih.gov/pubmed/31540211
http://dx.doi.org/10.3390/s19183953

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