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Microelectromechanical System-Based Electrochemical Seismometers with Two Pairs of Electrodes Integrated on One Chip
This paper presents microelectromechanical system (MEMS)-based electrochemical seismometers with two pairs of electrodes integrated on one chip. Both theoretical analysis and numerical simulations were conducted to reveal the working principle of the proposed electrochemical seismometers, finding th...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6767337/ https://www.ncbi.nlm.nih.gov/pubmed/31540211 http://dx.doi.org/10.3390/s19183953 |