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Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation
An ultra-fast method to directly grow metallic micro- and nano-structures is introduced. It relies on a Focused Ion Beam (FIB) and a condensed layer of suitable precursor material formed on the substrate under cryogenic conditions. The technique implies cooling the substrate below the condensation t...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6773749/ https://www.ncbi.nlm.nih.gov/pubmed/31575886 http://dx.doi.org/10.1038/s41598-019-50411-w |