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Fabrication and characterization of Si(1−)(x)Ge(x) nanocrystals in as-grown and annealed structures: a comparative study

Multilayer structures comprising of SiO(2)/SiGe/SiO(2) and containing SiGe nanoparticles were obtained by depositing SiO(2) layers using reactive direct current magnetron sputtering (dcMS), whereas, Si and Ge were co-sputtered using dcMS and high-power impulse magnetron sputtering (HiPIMS). The as-g...

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Detalles Bibliográficos
Autores principales:	Sultan, Muhammad Taha, Maraloiu, Adrian Valentin, Stavarache, Ionel, Gudmundsson, Jón Tómas, Manolescu, Andrei, Teodorescu, Valentin Serban, Ciurea, Magdalena Lidia, Svavarsson, Halldór Gudfinnur
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2019
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6774067/ https://www.ncbi.nlm.nih.gov/pubmed/31598453 http://dx.doi.org/10.3762/bjnano.10.182

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