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Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage
A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780070/ https://www.ncbi.nlm.nih.gov/pubmed/31480440 http://dx.doi.org/10.3390/mi10090581 |
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author | Zhang, Quan Zhao, Jianguo Shen, Xin Xiao, Qing Huang, Jun Wang, Yuan |
author_facet | Zhang, Quan Zhao, Jianguo Shen, Xin Xiao, Qing Huang, Jun Wang, Yuan |
author_sort | Zhang, Quan |
collection | PubMed |
description | A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and a Beam constrained model. The amplification ratio, input stiffness, and output stiffness of the stage are further derived, based on the proposed model. In order to verify the theoretical analysis, the finite element method (FEM) is used for simulation and modal analysis, and the simulation results indicate that the errors of the amplification ratio, input stiffness, and output stiffness of the stage between the proposed model and the FEM results are 2.34%, 3.87%, and 2.66%, respectively. Modal analysis results show that the fundamental natural frequency is 44 Hz, and the maximum error between the theoretical model and the FEM is less than 4%, which further validates the proposed modeling method. Finally, the prototype is fabricated to test the amplification ratio, cross-coupling error, and workspace. The experimental results demonstrate that the stage has a relatively large workspace, of 346.1 μm × 357.2 μm, with corresponding amplification ratios of 5.39 in the X-axis and 5.51 in the Y-axis, while the cross-coupling error is less than 1.5%. |
format | Online Article Text |
id | pubmed-6780070 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-67800702019-10-30 Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage Zhang, Quan Zhao, Jianguo Shen, Xin Xiao, Qing Huang, Jun Wang, Yuan Micromachines (Basel) Article A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and a Beam constrained model. The amplification ratio, input stiffness, and output stiffness of the stage are further derived, based on the proposed model. In order to verify the theoretical analysis, the finite element method (FEM) is used for simulation and modal analysis, and the simulation results indicate that the errors of the amplification ratio, input stiffness, and output stiffness of the stage between the proposed model and the FEM results are 2.34%, 3.87%, and 2.66%, respectively. Modal analysis results show that the fundamental natural frequency is 44 Hz, and the maximum error between the theoretical model and the FEM is less than 4%, which further validates the proposed modeling method. Finally, the prototype is fabricated to test the amplification ratio, cross-coupling error, and workspace. The experimental results demonstrate that the stage has a relatively large workspace, of 346.1 μm × 357.2 μm, with corresponding amplification ratios of 5.39 in the X-axis and 5.51 in the Y-axis, while the cross-coupling error is less than 1.5%. MDPI 2019-08-31 /pmc/articles/PMC6780070/ /pubmed/31480440 http://dx.doi.org/10.3390/mi10090581 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Zhang, Quan Zhao, Jianguo Shen, Xin Xiao, Qing Huang, Jun Wang, Yuan Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage |
title | Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage |
title_full | Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage |
title_fullStr | Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage |
title_full_unstemmed | Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage |
title_short | Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage |
title_sort | design, modeling, and testing of a novel xy piezo-actuated compliant micro-positioning stage |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780070/ https://www.ncbi.nlm.nih.gov/pubmed/31480440 http://dx.doi.org/10.3390/mi10090581 |
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