Cargando…

Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage

A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and...

Descripción completa

Detalles Bibliográficos
Autores principales: Zhang, Quan, Zhao, Jianguo, Shen, Xin, Xiao, Qing, Huang, Jun, Wang, Yuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780070/
https://www.ncbi.nlm.nih.gov/pubmed/31480440
http://dx.doi.org/10.3390/mi10090581
_version_ 1783457041069637632
author Zhang, Quan
Zhao, Jianguo
Shen, Xin
Xiao, Qing
Huang, Jun
Wang, Yuan
author_facet Zhang, Quan
Zhao, Jianguo
Shen, Xin
Xiao, Qing
Huang, Jun
Wang, Yuan
author_sort Zhang, Quan
collection PubMed
description A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and a Beam constrained model. The amplification ratio, input stiffness, and output stiffness of the stage are further derived, based on the proposed model. In order to verify the theoretical analysis, the finite element method (FEM) is used for simulation and modal analysis, and the simulation results indicate that the errors of the amplification ratio, input stiffness, and output stiffness of the stage between the proposed model and the FEM results are 2.34%, 3.87%, and 2.66%, respectively. Modal analysis results show that the fundamental natural frequency is 44 Hz, and the maximum error between the theoretical model and the FEM is less than 4%, which further validates the proposed modeling method. Finally, the prototype is fabricated to test the amplification ratio, cross-coupling error, and workspace. The experimental results demonstrate that the stage has a relatively large workspace, of 346.1 μm × 357.2 μm, with corresponding amplification ratios of 5.39 in the X-axis and 5.51 in the Y-axis, while the cross-coupling error is less than 1.5%.
format Online
Article
Text
id pubmed-6780070
institution National Center for Biotechnology Information
language English
publishDate 2019
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-67800702019-10-30 Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage Zhang, Quan Zhao, Jianguo Shen, Xin Xiao, Qing Huang, Jun Wang, Yuan Micromachines (Basel) Article A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and a Beam constrained model. The amplification ratio, input stiffness, and output stiffness of the stage are further derived, based on the proposed model. In order to verify the theoretical analysis, the finite element method (FEM) is used for simulation and modal analysis, and the simulation results indicate that the errors of the amplification ratio, input stiffness, and output stiffness of the stage between the proposed model and the FEM results are 2.34%, 3.87%, and 2.66%, respectively. Modal analysis results show that the fundamental natural frequency is 44 Hz, and the maximum error between the theoretical model and the FEM is less than 4%, which further validates the proposed modeling method. Finally, the prototype is fabricated to test the amplification ratio, cross-coupling error, and workspace. The experimental results demonstrate that the stage has a relatively large workspace, of 346.1 μm × 357.2 μm, with corresponding amplification ratios of 5.39 in the X-axis and 5.51 in the Y-axis, while the cross-coupling error is less than 1.5%. MDPI 2019-08-31 /pmc/articles/PMC6780070/ /pubmed/31480440 http://dx.doi.org/10.3390/mi10090581 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhang, Quan
Zhao, Jianguo
Shen, Xin
Xiao, Qing
Huang, Jun
Wang, Yuan
Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage
title Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage
title_full Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage
title_fullStr Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage
title_full_unstemmed Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage
title_short Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage
title_sort design, modeling, and testing of a novel xy piezo-actuated compliant micro-positioning stage
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780070/
https://www.ncbi.nlm.nih.gov/pubmed/31480440
http://dx.doi.org/10.3390/mi10090581
work_keys_str_mv AT zhangquan designmodelingandtestingofanovelxypiezoactuatedcompliantmicropositioningstage
AT zhaojianguo designmodelingandtestingofanovelxypiezoactuatedcompliantmicropositioningstage
AT shenxin designmodelingandtestingofanovelxypiezoactuatedcompliantmicropositioningstage
AT xiaoqing designmodelingandtestingofanovelxypiezoactuatedcompliantmicropositioningstage
AT huangjun designmodelingandtestingofanovelxypiezoactuatedcompliantmicropositioningstage
AT wangyuan designmodelingandtestingofanovelxypiezoactuatedcompliantmicropositioningstage