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Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage
A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and...
Autores principales: | Zhang, Quan, Zhao, Jianguo, Shen, Xin, Xiao, Qing, Huang, Jun, Wang, Yuan |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780070/ https://www.ncbi.nlm.nih.gov/pubmed/31480440 http://dx.doi.org/10.3390/mi10090581 |
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