Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critic...

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Detalles Bibliográficos
Autores principales: Zhang, Jianhao, Fang, Zhiwei, Lin, Jintian, Zhou, Junxia, Wang, Min, Wu, Rongbo, Gao, Renhong, Cheng, Ya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780164/
https://www.ncbi.nlm.nih.gov/pubmed/31470545
http://dx.doi.org/10.3390/nano9091218
Descripción
Sumario:We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 10(7) can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.

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