Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critic...

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Detalles Bibliográficos
Autores principales: Zhang, Jianhao, Fang, Zhiwei, Lin, Jintian, Zhou, Junxia, Wang, Min, Wu, Rongbo, Gao, Renhong, Cheng, Ya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780164/
https://www.ncbi.nlm.nih.gov/pubmed/31470545
http://dx.doi.org/10.3390/nano9091218
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author Zhang, Jianhao
Fang, Zhiwei
Lin, Jintian
Zhou, Junxia
Wang, Min
Wu, Rongbo
Gao, Renhong
Cheng, Ya
author_facet Zhang, Jianhao
Fang, Zhiwei
Lin, Jintian
Zhou, Junxia
Wang, Min
Wu, Rongbo
Gao, Renhong
Cheng, Ya
author_sort Zhang, Jianhao
collection PubMed
description We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 10(7) can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.
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spelling pubmed-67801642019-10-30 Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator Zhang, Jianhao Fang, Zhiwei Lin, Jintian Zhou, Junxia Wang, Min Wu, Rongbo Gao, Renhong Cheng, Ya Nanomaterials (Basel) Article We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 10(7) can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°. MDPI 2019-08-29 /pmc/articles/PMC6780164/ /pubmed/31470545 http://dx.doi.org/10.3390/nano9091218 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhang, Jianhao
Fang, Zhiwei
Lin, Jintian
Zhou, Junxia
Wang, Min
Wu, Rongbo
Gao, Renhong
Cheng, Ya
Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator
title Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator
title_full Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator
title_fullStr Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator
title_full_unstemmed Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator
title_short Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator
title_sort fabrication of crystalline microresonators of high quality factors with a controllable wedge angle on lithium niobate on insulator
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780164/
https://www.ncbi.nlm.nih.gov/pubmed/31470545
http://dx.doi.org/10.3390/nano9091218
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