A Large Measurable Range Capacitance-to-Digital Converter for Smart Humidity Sensors

This study aims to propose a capacitance-to-digital converter (CDC) based on a third-order cascade of integrators with a feed-forward (CIFF) incremental sigma-delta modulator for smart humidity sensor application. Disguised zoom-in technology was proposed to enlarge the measurable range of the CDC. The input range of the CDC was 0–388 pF. The proposed CDC was realized using 0.18 μm complementary metal-oxide-semiconductor technology. Results show that the CDC performs a 13-bit capacitance-to-digital conversion in 0.8 ms. The analog system consumes 169.7 μA from a 1.8 V supply, which corresponds to a figure of merit (FOM) of 3.0 nJ/step. The proposed CDC was combined with a HS1101 humidity sensor to demonstrate its incorporation in an overall system design. The resolution was 0.7% relative humidity (RH) over a range of 30%–90% RH.