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A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer

In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including the mass and the springs, is excited to resonate i...

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Detalles Bibliográficos
Autores principales:	Yang, Jian, Zhang, Meng, He, Yurong, Su, Yan, Han, Guowei, Si, Chaowei, Ning, Jin, Yang, Fuhua, Wang, Xiaodong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780656/ https://www.ncbi.nlm.nih.gov/pubmed/31489954 http://dx.doi.org/10.3390/mi10090589

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