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Trajectory Definition with High Relative Accuracy (HRA) by Parametric Representation of Curves in Nano-Positioning Systems

Nanotechnology applications demand high accuracy positioning systems. Therefore, in order to achieve sub-micrometer accuracy, positioning uncertainty contributions must be minimized by implementing precision positioning control strategies. The positioning control system accuracy must be analyzed and...

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Detalles Bibliográficos
Autores principales:	Díaz Pérez, Lucía, Rubio Serrano, Beatriz, Albajez García, José A., Yagüe Fabra, José A., Mainar Maza, Esmeralda, Torralba Gracia, Marta
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780816/ https://www.ncbi.nlm.nih.gov/pubmed/31510068 http://dx.doi.org/10.3390/mi10090597

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