A Low-Power CMOS Microfluidic Pump Based on Travelling-Wave Electroosmosis for Diluted Serum Pumping

Microfluidic pump is an essential component in lab-on-chip applications. It is of importance to develop an active microfluidic pump with low-power and low-cost characteristics for portable and miniaturized diagnostic systems. Taking advantages of CMOS technologies, in this work, we report a low-power microfluidic pump based on travelling-wave electroosmosis (TWEO). Utilizing an integrated driving circuit, this monolithic CMOS microfluidic pump can be operated at 1.5 V driving voltage with a power consumption of 1.74 mW. The integrated driving circuit consist of a resistor-capacitor (RC) oscillator, a 90-degrees phase-shift square wave generator, and buffer amplifiers. Moreover, capabilities of the developed CMOS TWEO pump to drive diluted human serum are characterized. The flow rate of diluted human serum with dilution ratio of 1:1000 can achieve 51 μm/s. This is the first time demonstrating an in-situ CMOS-based microfluidic pump to drive the clinical diluted serum sample. As a consequence, this work demonstrates an essential component of CMOS biotechnologies for potential applications of portable in vitro diagnosis (IVD) systems.