A high-sensitivity MEMS gravimeter with a large dynamic range

Precise measurement of variations in the local gravitational acceleration is valuable for natural hazard forecasting, prospecting, and geophysical studies. Common issues of the present gravimetry technologies include their high cost, high mass, and large volume, which can potentially be solved by mi...

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Autores principales: Tang, Shihao, Liu, Huafeng, Yan, Shitao, Xu, Xiaochao, Wu, Wenjie, Fan, Ji, Liu, Jinquan, Hu, Chenyuan, Tu, Liangcheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6799805/
https://www.ncbi.nlm.nih.gov/pubmed/31636934
http://dx.doi.org/10.1038/s41378-019-0089-7
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author Tang, Shihao
Liu, Huafeng
Yan, Shitao
Xu, Xiaochao
Wu, Wenjie
Fan, Ji
Liu, Jinquan
Hu, Chenyuan
Tu, Liangcheng
author_facet Tang, Shihao
Liu, Huafeng
Yan, Shitao
Xu, Xiaochao
Wu, Wenjie
Fan, Ji
Liu, Jinquan
Hu, Chenyuan
Tu, Liangcheng
author_sort Tang, Shihao
collection PubMed
description Precise measurement of variations in the local gravitational acceleration is valuable for natural hazard forecasting, prospecting, and geophysical studies. Common issues of the present gravimetry technologies include their high cost, high mass, and large volume, which can potentially be solved by micro-electromechanical-system (MEMS) technology. However, the reported MEMS gravimeter does not have a high sensitivity and a large dynamic range comparable with those of the present commercial gravimeters, lowering its practicability and ruling out worldwide deployment. In this paper, we introduce a more practical MEMS gravimeter that has a higher sensitivity of 8 μGal/√Hz and a larger dynamic range of 8000 mGal by using an advanced suspension design and a customized optical displacement transducer. The proposed MEMS gravimeter has performed the co-site earth tides measurement with a commercial superconducting gravimeter GWR iGrav with the results showing a correlation coefficient of 0.91.
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spelling pubmed-67998052019-10-21 A high-sensitivity MEMS gravimeter with a large dynamic range Tang, Shihao Liu, Huafeng Yan, Shitao Xu, Xiaochao Wu, Wenjie Fan, Ji Liu, Jinquan Hu, Chenyuan Tu, Liangcheng Microsyst Nanoeng Article Precise measurement of variations in the local gravitational acceleration is valuable for natural hazard forecasting, prospecting, and geophysical studies. Common issues of the present gravimetry technologies include their high cost, high mass, and large volume, which can potentially be solved by micro-electromechanical-system (MEMS) technology. However, the reported MEMS gravimeter does not have a high sensitivity and a large dynamic range comparable with those of the present commercial gravimeters, lowering its practicability and ruling out worldwide deployment. In this paper, we introduce a more practical MEMS gravimeter that has a higher sensitivity of 8 μGal/√Hz and a larger dynamic range of 8000 mGal by using an advanced suspension design and a customized optical displacement transducer. The proposed MEMS gravimeter has performed the co-site earth tides measurement with a commercial superconducting gravimeter GWR iGrav with the results showing a correlation coefficient of 0.91. Nature Publishing Group UK 2019-10-07 /pmc/articles/PMC6799805/ /pubmed/31636934 http://dx.doi.org/10.1038/s41378-019-0089-7 Text en © The Author(s) 2019 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Tang, Shihao
Liu, Huafeng
Yan, Shitao
Xu, Xiaochao
Wu, Wenjie
Fan, Ji
Liu, Jinquan
Hu, Chenyuan
Tu, Liangcheng
A high-sensitivity MEMS gravimeter with a large dynamic range
title A high-sensitivity MEMS gravimeter with a large dynamic range
title_full A high-sensitivity MEMS gravimeter with a large dynamic range
title_fullStr A high-sensitivity MEMS gravimeter with a large dynamic range
title_full_unstemmed A high-sensitivity MEMS gravimeter with a large dynamic range
title_short A high-sensitivity MEMS gravimeter with a large dynamic range
title_sort high-sensitivity mems gravimeter with a large dynamic range
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6799805/
https://www.ncbi.nlm.nih.gov/pubmed/31636934
http://dx.doi.org/10.1038/s41378-019-0089-7
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