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Fabrication of sharp silicon hollow microneedles by deep-reactive ion etching towards minimally invasive diagnostics
Microneedle technologies have the potential for expanding the capabilities of wearable health monitoring from physiology to biochemistry. This paper presents the fabrication of silicon hollow microneedles by a deep-reactive ion etching (DRIE) process, with the aim of exploring the feasibility of mic...
Autores principales: | Li, Yan, Zhang, Hang, Yang, Ruifeng, Laffitte, Yohan, Schmill, Ulises, Hu, Wenhan, Kaddoura, Moufeed, Blondeel, Eric J. M., Cui, Bo |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6799813/ https://www.ncbi.nlm.nih.gov/pubmed/31636931 http://dx.doi.org/10.1038/s41378-019-0077-y |
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