Cargando…

Pyrolysis-induced shrinking of three-dimensional structures fabricated by two-photon polymerization: experiment and theoretical model

The introduction of two-photon polymerization (TPP) into the area of Carbon Micro Electromechanical Systems (C-MEMS) has enabled the fabrication of three-dimensional glassy carbon nanostructures with geometries previously unattainable through conventional UV lithography. Pyrolysis of TPP structures...

Descripción completa

Detalles Bibliográficos
Autores principales: Cardenas-Benitez, Braulio, Eschenbaum, Carsten, Mager, Dario, Korvink, Jan G., Madou, Marc J., Lemmer, Uli, Leon, Israel De, Martinez-Chapa, Sergio O.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6799819/
https://www.ncbi.nlm.nih.gov/pubmed/31636928
http://dx.doi.org/10.1038/s41378-019-0079-9
_version_ 1783460373013200896
author Cardenas-Benitez, Braulio
Eschenbaum, Carsten
Mager, Dario
Korvink, Jan G.
Madou, Marc J.
Lemmer, Uli
Leon, Israel De
Martinez-Chapa, Sergio O.
author_facet Cardenas-Benitez, Braulio
Eschenbaum, Carsten
Mager, Dario
Korvink, Jan G.
Madou, Marc J.
Lemmer, Uli
Leon, Israel De
Martinez-Chapa, Sergio O.
author_sort Cardenas-Benitez, Braulio
collection PubMed
description The introduction of two-photon polymerization (TPP) into the area of Carbon Micro Electromechanical Systems (C-MEMS) has enabled the fabrication of three-dimensional glassy carbon nanostructures with geometries previously unattainable through conventional UV lithography. Pyrolysis of TPP structures conveys a characteristic reduction of feature size—one that should be properly estimated in order to produce carbon microdevices with accuracy. In this work, we studied the volumetric shrinkage of TPP-derived microwires upon pyrolysis at 900 °C. Through this process, photoresist microwires thermally decompose and shrink by as much as 75%, resulting in glassy carbon nanowires with linewidths between 300 and 550 nm. Even after the thermal decomposition induced by the pyrolysis step, the linewidth of the carbon nanowires was found to be dependent on the TPP exposure parameters. We have also found that the thermal stress induced during the pyrolysis step not only results in axial elongation of the nanowires, but also in buckling in the case of slender carbon nanowires (for aspect ratios greater than 30). Furthermore, we show that the calculated residual mass fraction that remains after pyrolysis depends on the characteristic dimensions of the photoresist microwires, a trend that is consistent with several works found in the literature. This phenomenon is explained through a semi-empirical model that estimates the feature size of the carbon structures, serving as a simple guideline for shrinkage evaluation in other designs.
format Online
Article
Text
id pubmed-6799819
institution National Center for Biotechnology Information
language English
publishDate 2019
publisher Nature Publishing Group UK
record_format MEDLINE/PubMed
spelling pubmed-67998192019-10-21 Pyrolysis-induced shrinking of three-dimensional structures fabricated by two-photon polymerization: experiment and theoretical model Cardenas-Benitez, Braulio Eschenbaum, Carsten Mager, Dario Korvink, Jan G. Madou, Marc J. Lemmer, Uli Leon, Israel De Martinez-Chapa, Sergio O. Microsyst Nanoeng Article The introduction of two-photon polymerization (TPP) into the area of Carbon Micro Electromechanical Systems (C-MEMS) has enabled the fabrication of three-dimensional glassy carbon nanostructures with geometries previously unattainable through conventional UV lithography. Pyrolysis of TPP structures conveys a characteristic reduction of feature size—one that should be properly estimated in order to produce carbon microdevices with accuracy. In this work, we studied the volumetric shrinkage of TPP-derived microwires upon pyrolysis at 900 °C. Through this process, photoresist microwires thermally decompose and shrink by as much as 75%, resulting in glassy carbon nanowires with linewidths between 300 and 550 nm. Even after the thermal decomposition induced by the pyrolysis step, the linewidth of the carbon nanowires was found to be dependent on the TPP exposure parameters. We have also found that the thermal stress induced during the pyrolysis step not only results in axial elongation of the nanowires, but also in buckling in the case of slender carbon nanowires (for aspect ratios greater than 30). Furthermore, we show that the calculated residual mass fraction that remains after pyrolysis depends on the characteristic dimensions of the photoresist microwires, a trend that is consistent with several works found in the literature. This phenomenon is explained through a semi-empirical model that estimates the feature size of the carbon structures, serving as a simple guideline for shrinkage evaluation in other designs. Nature Publishing Group UK 2019-08-26 /pmc/articles/PMC6799819/ /pubmed/31636928 http://dx.doi.org/10.1038/s41378-019-0079-9 Text en © The Author(s) 2019 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Cardenas-Benitez, Braulio
Eschenbaum, Carsten
Mager, Dario
Korvink, Jan G.
Madou, Marc J.
Lemmer, Uli
Leon, Israel De
Martinez-Chapa, Sergio O.
Pyrolysis-induced shrinking of three-dimensional structures fabricated by two-photon polymerization: experiment and theoretical model
title Pyrolysis-induced shrinking of three-dimensional structures fabricated by two-photon polymerization: experiment and theoretical model
title_full Pyrolysis-induced shrinking of three-dimensional structures fabricated by two-photon polymerization: experiment and theoretical model
title_fullStr Pyrolysis-induced shrinking of three-dimensional structures fabricated by two-photon polymerization: experiment and theoretical model
title_full_unstemmed Pyrolysis-induced shrinking of three-dimensional structures fabricated by two-photon polymerization: experiment and theoretical model
title_short Pyrolysis-induced shrinking of three-dimensional structures fabricated by two-photon polymerization: experiment and theoretical model
title_sort pyrolysis-induced shrinking of three-dimensional structures fabricated by two-photon polymerization: experiment and theoretical model
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6799819/
https://www.ncbi.nlm.nih.gov/pubmed/31636928
http://dx.doi.org/10.1038/s41378-019-0079-9
work_keys_str_mv AT cardenasbenitezbraulio pyrolysisinducedshrinkingofthreedimensionalstructuresfabricatedbytwophotonpolymerizationexperimentandtheoreticalmodel
AT eschenbaumcarsten pyrolysisinducedshrinkingofthreedimensionalstructuresfabricatedbytwophotonpolymerizationexperimentandtheoreticalmodel
AT magerdario pyrolysisinducedshrinkingofthreedimensionalstructuresfabricatedbytwophotonpolymerizationexperimentandtheoreticalmodel
AT korvinkjang pyrolysisinducedshrinkingofthreedimensionalstructuresfabricatedbytwophotonpolymerizationexperimentandtheoreticalmodel
AT madoumarcj pyrolysisinducedshrinkingofthreedimensionalstructuresfabricatedbytwophotonpolymerizationexperimentandtheoreticalmodel
AT lemmeruli pyrolysisinducedshrinkingofthreedimensionalstructuresfabricatedbytwophotonpolymerizationexperimentandtheoreticalmodel
AT leonisraelde pyrolysisinducedshrinkingofthreedimensionalstructuresfabricatedbytwophotonpolymerizationexperimentandtheoreticalmodel
AT martinezchapasergioo pyrolysisinducedshrinkingofthreedimensionalstructuresfabricatedbytwophotonpolymerizationexperimentandtheoreticalmodel