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Optically read Coriolis vibratory gyroscope based on a silicon tuning fork
In this work, we describe the design, fabrication, and characterization of purely mechanical miniature resonating structures that exhibit gyroscopic performance comparable to that of more complex microelectromechanical systems. Compared to previous implementations of Coriolis vibratory gyroscopes, t...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2019
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6803679/ https://www.ncbi.nlm.nih.gov/pubmed/31645997 http://dx.doi.org/10.1038/s41378-019-0087-9 |