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Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor
This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the juncti...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6806205/ https://www.ncbi.nlm.nih.gov/pubmed/31597318 http://dx.doi.org/10.3390/s19194346 |
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author | Jing, Yachao Fan, Guofang Wang, Rongwei Zhang, Zeping Cai, Xiaoyu Wei, Jiasi Chen, Xin Li, Hongyu Li, Yuan |
author_facet | Jing, Yachao Fan, Guofang Wang, Rongwei Zhang, Zeping Cai, Xiaoyu Wei, Jiasi Chen, Xin Li, Hongyu Li, Yuan |
author_sort | Jing, Yachao |
collection | PubMed |
description | This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the junction. The buffer-associated optical losses were examined for different cantilever thicknesses. The optimum length of the buffer was found to be 0.97 μm for a cantilever thickness of 300 nm. With this configuration, the optical loss was reduced to about 40%, and the maximum sensitivity was more than twice that of the conventional structure. |
format | Online Article Text |
id | pubmed-6806205 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-68062052019-11-07 Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor Jing, Yachao Fan, Guofang Wang, Rongwei Zhang, Zeping Cai, Xiaoyu Wei, Jiasi Chen, Xin Li, Hongyu Li, Yuan Sensors (Basel) Article This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the junction. The buffer-associated optical losses were examined for different cantilever thicknesses. The optimum length of the buffer was found to be 0.97 μm for a cantilever thickness of 300 nm. With this configuration, the optical loss was reduced to about 40%, and the maximum sensitivity was more than twice that of the conventional structure. MDPI 2019-10-08 /pmc/articles/PMC6806205/ /pubmed/31597318 http://dx.doi.org/10.3390/s19194346 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Jing, Yachao Fan, Guofang Wang, Rongwei Zhang, Zeping Cai, Xiaoyu Wei, Jiasi Chen, Xin Li, Hongyu Li, Yuan Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor |
title | Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor |
title_full | Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor |
title_fullStr | Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor |
title_full_unstemmed | Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor |
title_short | Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor |
title_sort | improved optical waveguide microcantilever for integrated nanomechanical sensor |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6806205/ https://www.ncbi.nlm.nih.gov/pubmed/31597318 http://dx.doi.org/10.3390/s19194346 |
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