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Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor

This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the juncti...

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Detalles Bibliográficos
Autores principales: Jing, Yachao, Fan, Guofang, Wang, Rongwei, Zhang, Zeping, Cai, Xiaoyu, Wei, Jiasi, Chen, Xin, Li, Hongyu, Li, Yuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6806205/
https://www.ncbi.nlm.nih.gov/pubmed/31597318
http://dx.doi.org/10.3390/s19194346
_version_ 1783461575470874624
author Jing, Yachao
Fan, Guofang
Wang, Rongwei
Zhang, Zeping
Cai, Xiaoyu
Wei, Jiasi
Chen, Xin
Li, Hongyu
Li, Yuan
author_facet Jing, Yachao
Fan, Guofang
Wang, Rongwei
Zhang, Zeping
Cai, Xiaoyu
Wei, Jiasi
Chen, Xin
Li, Hongyu
Li, Yuan
author_sort Jing, Yachao
collection PubMed
description This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the junction. The buffer-associated optical losses were examined for different cantilever thicknesses. The optimum length of the buffer was found to be 0.97 μm for a cantilever thickness of 300 nm. With this configuration, the optical loss was reduced to about 40%, and the maximum sensitivity was more than twice that of the conventional structure.
format Online
Article
Text
id pubmed-6806205
institution National Center for Biotechnology Information
language English
publishDate 2019
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-68062052019-11-07 Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor Jing, Yachao Fan, Guofang Wang, Rongwei Zhang, Zeping Cai, Xiaoyu Wei, Jiasi Chen, Xin Li, Hongyu Li, Yuan Sensors (Basel) Article This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the junction. The buffer-associated optical losses were examined for different cantilever thicknesses. The optimum length of the buffer was found to be 0.97 μm for a cantilever thickness of 300 nm. With this configuration, the optical loss was reduced to about 40%, and the maximum sensitivity was more than twice that of the conventional structure. MDPI 2019-10-08 /pmc/articles/PMC6806205/ /pubmed/31597318 http://dx.doi.org/10.3390/s19194346 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Jing, Yachao
Fan, Guofang
Wang, Rongwei
Zhang, Zeping
Cai, Xiaoyu
Wei, Jiasi
Chen, Xin
Li, Hongyu
Li, Yuan
Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor
title Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor
title_full Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor
title_fullStr Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor
title_full_unstemmed Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor
title_short Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor
title_sort improved optical waveguide microcantilever for integrated nanomechanical sensor
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6806205/
https://www.ncbi.nlm.nih.gov/pubmed/31597318
http://dx.doi.org/10.3390/s19194346
work_keys_str_mv AT jingyachao improvedopticalwaveguidemicrocantileverforintegratednanomechanicalsensor
AT fanguofang improvedopticalwaveguidemicrocantileverforintegratednanomechanicalsensor
AT wangrongwei improvedopticalwaveguidemicrocantileverforintegratednanomechanicalsensor
AT zhangzeping improvedopticalwaveguidemicrocantileverforintegratednanomechanicalsensor
AT caixiaoyu improvedopticalwaveguidemicrocantileverforintegratednanomechanicalsensor
AT weijiasi improvedopticalwaveguidemicrocantileverforintegratednanomechanicalsensor
AT chenxin improvedopticalwaveguidemicrocantileverforintegratednanomechanicalsensor
AT lihongyu improvedopticalwaveguidemicrocantileverforintegratednanomechanicalsensor
AT liyuan improvedopticalwaveguidemicrocantileverforintegratednanomechanicalsensor