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Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor
This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the juncti...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6806205/ https://www.ncbi.nlm.nih.gov/pubmed/31597318 http://dx.doi.org/10.3390/s19194346 |