Design and Fabrication of CMOS Microstructures to Locally Synthesize Carbon Nanotubes for Gas Sensing

Carbon nanotubes (CNTs) can be grown locally on custom-designed CMOS microstructures to use them as a sensing material for manufacturing low-cost gas sensors, where CMOS readout circuits are directly integrated. Such a local CNT synthesis process using thermal chemical vapor deposition (CVD) require...

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Detalles Bibliográficos
Autores principales: Roy, Avisek, Azadmehr, Mehdi, Ta, Bao Q., Häfliger, Philipp, Aasmundtveit, Knut E.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6806221/
https://www.ncbi.nlm.nih.gov/pubmed/31597303
http://dx.doi.org/10.3390/s19194340

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6806221/
https://www.ncbi.nlm.nih.gov/pubmed/31597303
http://dx.doi.org/10.3390/s19194340

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