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High-performance Acetone Soluble Tape Transfer Printing Method for Heterogeneous Integration

A high-performance transfer printing method using a new soluble tape which can be dissolved in acetone is proposed to be used in heterogeneous integration. Si inks array was transferred from SOI wafers onto various substrates without adhesion promoter by this new method which we refer to as the acet...

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Detalles Bibliográficos
Autores principales:	Zhang, Jiaqi, Wu, Yichang, Li, Zhe, Zhang, Yachao, Peng, Yue, Chen, Dazheng, Zhu, Weidong, Xu, Shengrui, Zhang, Chunfu, Hao, Yue
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6823356/ https://www.ncbi.nlm.nih.gov/pubmed/31673059 http://dx.doi.org/10.1038/s41598-019-52235-0

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