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3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI

This paper presents three-dimensional (3D) models of high-frequency piezoelectric micromachined ultrasonic transducers (PMUTs) based on the finite element method (FEM). These models are verified with fabricated aluminum nitride (AlN)-based PMUT arrays. The 3D numerical model consists of a sandwiched...

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Detalles Bibliográficos
Autores principales:	Liu, Wenjuan, He, Leming, Wang, Xubo, Zhou, Jia, Xu, Weijiang, Smagin, Nikolay, Toubal, Malika, Yu, Hao, Gu, Yuandong, Xu, Jinghui, Remiens, Denis, Ren, Junyan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6832214/ https://www.ncbi.nlm.nih.gov/pubmed/31615076 http://dx.doi.org/10.3390/s19204450

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