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Design and Fabrication Challenges of a Highly Sensitive Thermoelectric-Based Hydrogen Gas Sensor

This paper presents a highly sensitive thermoelectric sensor for catalytic combustible gas detection. The sensor contains two low-stress (+176 MPa) membranes of a combination of stoichiometric and silicon-rich silicon nitride that makes them chemically and thermally stable. The complete fabrication...

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Detalles Bibliográficos
Autores principales:	Pranti, Anmona Shabnam, Loof, Daniel, Kunz, Sebastian, Zielasek, Volkmar, Bäumer, Marcus, Lang, Walter
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843170/ https://www.ncbi.nlm.nih.gov/pubmed/31569728 http://dx.doi.org/10.3390/mi10100650

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