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External Electromagnet FPCB Micromirror for Large Angle Laser Scanning

An external electromagnet plus moving PM (permanent magnet) FPCB (flexible printed circuit board) micromirror is proposed in this paper that can overcome two limitations associated with the previous FPCB micromirror with a configuration of an external PM plus moving coil, i.e., (1) it reduces the ov...

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Autores principales: Periyasamy, Karlmarx G. K., Tan, Vixen Joshua, He, Siyuan, Kourtzanidis, Nikolaos
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843381/
https://www.ncbi.nlm.nih.gov/pubmed/31575067
http://dx.doi.org/10.3390/mi10100667
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author Periyasamy, Karlmarx G. K.
Tan, Vixen Joshua
He, Siyuan
Kourtzanidis, Nikolaos
author_facet Periyasamy, Karlmarx G. K.
Tan, Vixen Joshua
He, Siyuan
Kourtzanidis, Nikolaos
author_sort Periyasamy, Karlmarx G. K.
collection PubMed
description An external electromagnet plus moving PM (permanent magnet) FPCB (flexible printed circuit board) micromirror is proposed in this paper that can overcome two limitations associated with the previous FPCB micromirror with a configuration of an external PM plus moving coil, i.e., (1) it reduces the overall width beyond the mirror plate, and (2) increases the maximum rotation angle. The micromirror has two external electromagnets underneath an FPCB structure (two torsion beams and a middle seat) with two moving PM discs attached to the back and a metal-coated mirror plate bonded to the front of the FPCB middle seat. Modeling and simulation were introduced, and the prototype was fabricated and tested to verify the design. The achieved performance was better than that of the previous design: a maximum resonant rotation angle of 62° (optical) at a driving voltage of ±3 V with a frequency of 191 Hz, the required extra width beyond the mirror plate was 6 mm, and an aperture of 8 mm × 5.5 mm with a roughness of <10 nm and a flatness of >10 m (ROC, radius of curvature). The previous FPCB micromirror’s performance was: strain limited maximum rotation angle was 40° (optical), the extra width beyond the mirror plate was 14.7 mm, and had an aperture of 4 mm × 4 mm with a similar roughness and flatness.
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spelling pubmed-68433812019-11-25 External Electromagnet FPCB Micromirror for Large Angle Laser Scanning Periyasamy, Karlmarx G. K. Tan, Vixen Joshua He, Siyuan Kourtzanidis, Nikolaos Micromachines (Basel) Article An external electromagnet plus moving PM (permanent magnet) FPCB (flexible printed circuit board) micromirror is proposed in this paper that can overcome two limitations associated with the previous FPCB micromirror with a configuration of an external PM plus moving coil, i.e., (1) it reduces the overall width beyond the mirror plate, and (2) increases the maximum rotation angle. The micromirror has two external electromagnets underneath an FPCB structure (two torsion beams and a middle seat) with two moving PM discs attached to the back and a metal-coated mirror plate bonded to the front of the FPCB middle seat. Modeling and simulation were introduced, and the prototype was fabricated and tested to verify the design. The achieved performance was better than that of the previous design: a maximum resonant rotation angle of 62° (optical) at a driving voltage of ±3 V with a frequency of 191 Hz, the required extra width beyond the mirror plate was 6 mm, and an aperture of 8 mm × 5.5 mm with a roughness of <10 nm and a flatness of >10 m (ROC, radius of curvature). The previous FPCB micromirror’s performance was: strain limited maximum rotation angle was 40° (optical), the extra width beyond the mirror plate was 14.7 mm, and had an aperture of 4 mm × 4 mm with a similar roughness and flatness. MDPI 2019-09-30 /pmc/articles/PMC6843381/ /pubmed/31575067 http://dx.doi.org/10.3390/mi10100667 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Periyasamy, Karlmarx G. K.
Tan, Vixen Joshua
He, Siyuan
Kourtzanidis, Nikolaos
External Electromagnet FPCB Micromirror for Large Angle Laser Scanning
title External Electromagnet FPCB Micromirror for Large Angle Laser Scanning
title_full External Electromagnet FPCB Micromirror for Large Angle Laser Scanning
title_fullStr External Electromagnet FPCB Micromirror for Large Angle Laser Scanning
title_full_unstemmed External Electromagnet FPCB Micromirror for Large Angle Laser Scanning
title_short External Electromagnet FPCB Micromirror for Large Angle Laser Scanning
title_sort external electromagnet fpcb micromirror for large angle laser scanning
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843381/
https://www.ncbi.nlm.nih.gov/pubmed/31575067
http://dx.doi.org/10.3390/mi10100667
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