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Understanding the microstructural evolution and mechanical properties of transparent Al-O-N and Al-Si-O-N films

Optically transparent, colorless Al-O-N and Al-Si-O-N coatings with discretely varied O and Si contents were fabricated by reactive direct current magnetron sputtering (R-DCMS) from elemental Al and Si targets and O(2) and N(2) reactive gases. The Si/Al content was adjusted through the electrical po...

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Detalles Bibliográficos
Autores principales:	Fischer, Maria, Trant, Mathis, Thorwarth, Kerstin, Crockett, Rowena, Patscheider, Jörg, Hug, Hans Josef
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Taylor & Francis 2019
Materias:	Engineering and Structural materials
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6844387/ https://www.ncbi.nlm.nih.gov/pubmed/31723370 http://dx.doi.org/10.1080/14686996.2019.1666425

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