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Silicon photonics waveguide array sensor for selective detection of VOCs at room temperature
We report on the fabrication and characterization of a volatile organic compound sensor architecture addressing common drawbacks of photonic integrated sensors such as reusability and specificity. The proposed sensor, built on a silicon-on-insulator platform and based on arrayed waveguide interferen...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6863817/ https://www.ncbi.nlm.nih.gov/pubmed/31745099 http://dx.doi.org/10.1038/s41598-019-52264-9 |
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author | Janeiro, Ricardo Flores, Raquel Viegas, Jaime |
author_facet | Janeiro, Ricardo Flores, Raquel Viegas, Jaime |
author_sort | Janeiro, Ricardo |
collection | PubMed |
description | We report on the fabrication and characterization of a volatile organic compound sensor architecture addressing common drawbacks of photonic integrated sensors such as reusability and specificity. The proposed sensor, built on a silicon-on-insulator platform and based on arrayed waveguide interference, has a chemically selective polydimethylsiloxane polymer cladding, which encapsulates the waveguides and provides an expandable and permeable low refractive index material. This cladding material acts as the chemical transducer element, changing its optical properties when in contact with specific volatile organic compounds, whose presence in the context of environmental and public health protection is important to monitor. The sensor operates at room temperature and its selectivity was confirmed by multiple tests with water, toluene, chlorobenzene, and hexane, through which the sturdiness of the sensor was verified. A maximum spectral shift of about 22.8 nm was measured under testing with chlorobenzene, at a central wavelength of 1566.7 nm. In addition, a sensitivity of 234.8 pm/% was obtained for chlorobenzene mass percent concentrations, with a limit of detection of 0.24%(m/m). The thermal sensitivity of the sensor has been found to be 0.9 nm/°C. |
format | Online Article Text |
id | pubmed-6863817 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-68638172019-11-20 Silicon photonics waveguide array sensor for selective detection of VOCs at room temperature Janeiro, Ricardo Flores, Raquel Viegas, Jaime Sci Rep Article We report on the fabrication and characterization of a volatile organic compound sensor architecture addressing common drawbacks of photonic integrated sensors such as reusability and specificity. The proposed sensor, built on a silicon-on-insulator platform and based on arrayed waveguide interference, has a chemically selective polydimethylsiloxane polymer cladding, which encapsulates the waveguides and provides an expandable and permeable low refractive index material. This cladding material acts as the chemical transducer element, changing its optical properties when in contact with specific volatile organic compounds, whose presence in the context of environmental and public health protection is important to monitor. The sensor operates at room temperature and its selectivity was confirmed by multiple tests with water, toluene, chlorobenzene, and hexane, through which the sturdiness of the sensor was verified. A maximum spectral shift of about 22.8 nm was measured under testing with chlorobenzene, at a central wavelength of 1566.7 nm. In addition, a sensitivity of 234.8 pm/% was obtained for chlorobenzene mass percent concentrations, with a limit of detection of 0.24%(m/m). The thermal sensitivity of the sensor has been found to be 0.9 nm/°C. Nature Publishing Group UK 2019-11-19 /pmc/articles/PMC6863817/ /pubmed/31745099 http://dx.doi.org/10.1038/s41598-019-52264-9 Text en © The Author(s) 2019 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. |
spellingShingle | Article Janeiro, Ricardo Flores, Raquel Viegas, Jaime Silicon photonics waveguide array sensor for selective detection of VOCs at room temperature |
title | Silicon photonics waveguide array sensor for selective detection of VOCs at room temperature |
title_full | Silicon photonics waveguide array sensor for selective detection of VOCs at room temperature |
title_fullStr | Silicon photonics waveguide array sensor for selective detection of VOCs at room temperature |
title_full_unstemmed | Silicon photonics waveguide array sensor for selective detection of VOCs at room temperature |
title_short | Silicon photonics waveguide array sensor for selective detection of VOCs at room temperature |
title_sort | silicon photonics waveguide array sensor for selective detection of vocs at room temperature |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6863817/ https://www.ncbi.nlm.nih.gov/pubmed/31745099 http://dx.doi.org/10.1038/s41598-019-52264-9 |
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