Piezoelectric Micromachined Ultrasonic Transducers with a Cost-Effective Bottom-Up Fabrication Scheme for Millimeter-Scale Range Finding

This study proposes a novel piezoelectric micromachined ultrasonic transducer (PMUT), fabricated on a metal foil. Using a bottom-up, cost-effective micromachining technique, the PMUTs made of electrodes, a piezoelectric film, or electrode-sandwiched structures with versatile patterns were implemente...

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Detalles Bibliográficos
Autores principales: Feng, Guo-Hua, Liu, Hua-Jin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6864813/
https://www.ncbi.nlm.nih.gov/pubmed/31671739
http://dx.doi.org/10.3390/s19214696

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6864813/
https://www.ncbi.nlm.nih.gov/pubmed/31671739
http://dx.doi.org/10.3390/s19214696

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