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Piezoelectric Micromachined Ultrasonic Transducers with a Cost-Effective Bottom-Up Fabrication Scheme for Millimeter-Scale Range Finding
This study proposes a novel piezoelectric micromachined ultrasonic transducer (PMUT), fabricated on a metal foil. Using a bottom-up, cost-effective micromachining technique, the PMUTs made of electrodes, a piezoelectric film, or electrode-sandwiched structures with versatile patterns were implemente...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6864813/ https://www.ncbi.nlm.nih.gov/pubmed/31671739 http://dx.doi.org/10.3390/s19214696 |