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Comparison of Measurements with Finite-Element Analysis of Silicon-Diaphragm-Based Fiber-Optic Fabry–Perot Temperature Sensors

Silicon-diaphragm-based fiber-optic Fabry–Perot sensors with different intracavity pressures were fabricated by anodic bonding and microelectromechanical techniques. The thermal stress and thermal expansion of the Fabry–Perot (FP) sensor caused by high-temperature bonding and temperature change were...

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Detalles Bibliográficos
Autores principales:	Wang, Rongkun, Xie, Xuejian, Xu, Xiangang, Chen, Xiufang, Xiao, Longfei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6864838/ https://www.ncbi.nlm.nih.gov/pubmed/31684134 http://dx.doi.org/10.3390/s19214780

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