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Obliquely Deposited Titanium Nitride Nanorod Arrays as Surface-Enhanced Raman Scattering Substrates †

In this work, titanium nitride (TiN) nanorod arrays were prepared as surface-enhanced Raman scattering (SERS) substrates using glancing angle deposition (GLAD) in a magnetron sputtering system. The nitrogen flow rate was varied from R(N)(2) = 1 to 3 sccm, yielding five TiN uniform thin films and fiv...

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Detalles Bibliográficos
Autores principales:	Jen, Yi-Jun, Lin, Meng-Jie, Cheang, Hou-Lon, Chan, Teh-Li
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6866131/ https://www.ncbi.nlm.nih.gov/pubmed/31684022 http://dx.doi.org/10.3390/s19214765

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