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Mixed-gas CH(4)/CO(2)/CO detection based on linear variable optical filter and thermopile detector array
This paper presents the design, fabrication, and characterization of a middle-infrared (MIR) linear variable optical filter (LVOF) and thermopile detectors that will be used in a miniaturized mixed gas detector for CH(4)/CO(2)/CO measurement. The LVOF was designed as a tapered-cavity Fabry-Pérot opt...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6877684/ https://www.ncbi.nlm.nih.gov/pubmed/31768694 http://dx.doi.org/10.1186/s11671-019-3176-7 |
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author | Zhang, Shaoda Bin, Wu Xu, Binbin Zheng, Xingyu Chen, Binbin Lv, Xueqin San, Haisheng Hofmann, Werner |
author_facet | Zhang, Shaoda Bin, Wu Xu, Binbin Zheng, Xingyu Chen, Binbin Lv, Xueqin San, Haisheng Hofmann, Werner |
author_sort | Zhang, Shaoda |
collection | PubMed |
description | This paper presents the design, fabrication, and characterization of a middle-infrared (MIR) linear variable optical filter (LVOF) and thermopile detectors that will be used in a miniaturized mixed gas detector for CH(4)/CO(2)/CO measurement. The LVOF was designed as a tapered-cavity Fabry-Pérot optical filter, which can transform the MIR continuous spectrum into multiple narrow band-pass spectra with peak wavelength in linear variation. Multi-layer dielectric structures were used to fabricate the Bragg reflectors on the both sides of tapered cavity as well as the antireflective film combined with the function of out-of-band rejection. The uncooled thermopile detectors were designed and fabricated as a multiple-thermocouple suspension structure using micro-electro-mechanical system technology. Experimentally, the LVOF exhibits a mean full-width-at-half-maximum of 400 nm and mean peak transmittance of 70% at the wavelength range of 2.3~5 μm. The thermopile detectors exhibit a responsivity of 146 μV/°C at the condition of room temperature. It is demonstrated that the detectors can achieve the quantification and identification of CH(4)/CO(2)/CO mixed gas. |
format | Online Article Text |
id | pubmed-6877684 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | Springer US |
record_format | MEDLINE/PubMed |
spelling | pubmed-68776842019-12-10 Mixed-gas CH(4)/CO(2)/CO detection based on linear variable optical filter and thermopile detector array Zhang, Shaoda Bin, Wu Xu, Binbin Zheng, Xingyu Chen, Binbin Lv, Xueqin San, Haisheng Hofmann, Werner Nanoscale Res Lett Nano Express This paper presents the design, fabrication, and characterization of a middle-infrared (MIR) linear variable optical filter (LVOF) and thermopile detectors that will be used in a miniaturized mixed gas detector for CH(4)/CO(2)/CO measurement. The LVOF was designed as a tapered-cavity Fabry-Pérot optical filter, which can transform the MIR continuous spectrum into multiple narrow band-pass spectra with peak wavelength in linear variation. Multi-layer dielectric structures were used to fabricate the Bragg reflectors on the both sides of tapered cavity as well as the antireflective film combined with the function of out-of-band rejection. The uncooled thermopile detectors were designed and fabricated as a multiple-thermocouple suspension structure using micro-electro-mechanical system technology. Experimentally, the LVOF exhibits a mean full-width-at-half-maximum of 400 nm and mean peak transmittance of 70% at the wavelength range of 2.3~5 μm. The thermopile detectors exhibit a responsivity of 146 μV/°C at the condition of room temperature. It is demonstrated that the detectors can achieve the quantification and identification of CH(4)/CO(2)/CO mixed gas. Springer US 2019-11-25 /pmc/articles/PMC6877684/ /pubmed/31768694 http://dx.doi.org/10.1186/s11671-019-3176-7 Text en © The Author(s). 2019 Open AccessThis article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. |
spellingShingle | Nano Express Zhang, Shaoda Bin, Wu Xu, Binbin Zheng, Xingyu Chen, Binbin Lv, Xueqin San, Haisheng Hofmann, Werner Mixed-gas CH(4)/CO(2)/CO detection based on linear variable optical filter and thermopile detector array |
title | Mixed-gas CH(4)/CO(2)/CO detection based on linear variable optical filter and thermopile detector array |
title_full | Mixed-gas CH(4)/CO(2)/CO detection based on linear variable optical filter and thermopile detector array |
title_fullStr | Mixed-gas CH(4)/CO(2)/CO detection based on linear variable optical filter and thermopile detector array |
title_full_unstemmed | Mixed-gas CH(4)/CO(2)/CO detection based on linear variable optical filter and thermopile detector array |
title_short | Mixed-gas CH(4)/CO(2)/CO detection based on linear variable optical filter and thermopile detector array |
title_sort | mixed-gas ch(4)/co(2)/co detection based on linear variable optical filter and thermopile detector array |
topic | Nano Express |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6877684/ https://www.ncbi.nlm.nih.gov/pubmed/31768694 http://dx.doi.org/10.1186/s11671-019-3176-7 |
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