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Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition

[Image: see text] Phase-controlled synthesis of two-dimensional (2D) transition-metal chalcogenides (TMCs) at low temperatures with a precise thickness control has to date been rarely reported. Here, we report on a process for the phase-controlled synthesis of TiS(2) (metallic) and TiS(3) (semicondu...

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Detalles Bibliográficos
Autores principales:	Basuvalingam, Saravana Balaji, Zhang, Yue, Bloodgood, Matthew A., Godiksen, Rasmus H., Curto, Alberto G., Hofmann, Jan P., Verheijen, Marcel A., Kessels, Wilhelmus M. M., Bol, Ageeth A.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2019
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6883357/ https://www.ncbi.nlm.nih.gov/pubmed/31806923 http://dx.doi.org/10.1021/acs.chemmater.9b02895

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