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Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits

Large-scale, defect-free, micro- and nano-circuits with controlled inter-connections represent the nexus between electronic and photonic components. However, their fabrication over large scales often requires demanding procedures that are hardly scalable. Here we synthesize arrays of parallel ultra-...

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Autores principales: Bollani, Monica, Salvalaglio, Marco, Benali, Abdennacer, Bouabdellaoui, Mohammed, Naffouti, Meher, Lodari, Mario, Corato, Stefano Di, Fedorov, Alexey, Voigt, Axel, Fraj, Ibtissem, Favre, Luc, Claude, Jean Benoit, Grosso, David, Nicotra, Giuseppe, Mio, Antonio, Ronda, Antoine, Berbezier, Isabelle, Abbarchi, Marco
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6904683/
https://www.ncbi.nlm.nih.gov/pubmed/31822679
http://dx.doi.org/10.1038/s41467-019-13371-3
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author Bollani, Monica
Salvalaglio, Marco
Benali, Abdennacer
Bouabdellaoui, Mohammed
Naffouti, Meher
Lodari, Mario
Corato, Stefano Di
Fedorov, Alexey
Voigt, Axel
Fraj, Ibtissem
Favre, Luc
Claude, Jean Benoit
Grosso, David
Nicotra, Giuseppe
Mio, Antonio
Ronda, Antoine
Berbezier, Isabelle
Abbarchi, Marco
author_facet Bollani, Monica
Salvalaglio, Marco
Benali, Abdennacer
Bouabdellaoui, Mohammed
Naffouti, Meher
Lodari, Mario
Corato, Stefano Di
Fedorov, Alexey
Voigt, Axel
Fraj, Ibtissem
Favre, Luc
Claude, Jean Benoit
Grosso, David
Nicotra, Giuseppe
Mio, Antonio
Ronda, Antoine
Berbezier, Isabelle
Abbarchi, Marco
author_sort Bollani, Monica
collection PubMed
description Large-scale, defect-free, micro- and nano-circuits with controlled inter-connections represent the nexus between electronic and photonic components. However, their fabrication over large scales often requires demanding procedures that are hardly scalable. Here we synthesize arrays of parallel ultra-long (up to 0.75 mm), monocrystalline, silicon-based nano-wires and complex, connected circuits exploiting low-resolution etching and annealing of thin silicon films on insulator. Phase field simulations reveal that crystal faceting and stabilization of the wires against breaking is due to surface energy anisotropy. Wires splitting, inter-connections and direction are independently managed by engineering the dewetting fronts and exploiting the spontaneous formation of kinks. Finally, we fabricate field-effect transistors with state-of-the-art trans-conductance and electron mobility. Beyond the first experimental evidence of controlled dewetting of patches featuring a record aspect ratio of [Formula: see text] 1/60000 and self-assembled [Formula: see text] mm long nano-wires, our method constitutes a distinct and promising approach for the deterministic implementation of atomically-smooth, mono-crystalline electronic and photonic circuits.
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spelling pubmed-69046832019-12-12 Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits Bollani, Monica Salvalaglio, Marco Benali, Abdennacer Bouabdellaoui, Mohammed Naffouti, Meher Lodari, Mario Corato, Stefano Di Fedorov, Alexey Voigt, Axel Fraj, Ibtissem Favre, Luc Claude, Jean Benoit Grosso, David Nicotra, Giuseppe Mio, Antonio Ronda, Antoine Berbezier, Isabelle Abbarchi, Marco Nat Commun Article Large-scale, defect-free, micro- and nano-circuits with controlled inter-connections represent the nexus between electronic and photonic components. However, their fabrication over large scales often requires demanding procedures that are hardly scalable. Here we synthesize arrays of parallel ultra-long (up to 0.75 mm), monocrystalline, silicon-based nano-wires and complex, connected circuits exploiting low-resolution etching and annealing of thin silicon films on insulator. Phase field simulations reveal that crystal faceting and stabilization of the wires against breaking is due to surface energy anisotropy. Wires splitting, inter-connections and direction are independently managed by engineering the dewetting fronts and exploiting the spontaneous formation of kinks. Finally, we fabricate field-effect transistors with state-of-the-art trans-conductance and electron mobility. Beyond the first experimental evidence of controlled dewetting of patches featuring a record aspect ratio of [Formula: see text] 1/60000 and self-assembled [Formula: see text] mm long nano-wires, our method constitutes a distinct and promising approach for the deterministic implementation of atomically-smooth, mono-crystalline electronic and photonic circuits. Nature Publishing Group UK 2019-12-10 /pmc/articles/PMC6904683/ /pubmed/31822679 http://dx.doi.org/10.1038/s41467-019-13371-3 Text en © The Author(s) 2019 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Bollani, Monica
Salvalaglio, Marco
Benali, Abdennacer
Bouabdellaoui, Mohammed
Naffouti, Meher
Lodari, Mario
Corato, Stefano Di
Fedorov, Alexey
Voigt, Axel
Fraj, Ibtissem
Favre, Luc
Claude, Jean Benoit
Grosso, David
Nicotra, Giuseppe
Mio, Antonio
Ronda, Antoine
Berbezier, Isabelle
Abbarchi, Marco
Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits
title Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits
title_full Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits
title_fullStr Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits
title_full_unstemmed Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits
title_short Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits
title_sort templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6904683/
https://www.ncbi.nlm.nih.gov/pubmed/31822679
http://dx.doi.org/10.1038/s41467-019-13371-3
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