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Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits
Large-scale, defect-free, micro- and nano-circuits with controlled inter-connections represent the nexus between electronic and photonic components. However, their fabrication over large scales often requires demanding procedures that are hardly scalable. Here we synthesize arrays of parallel ultra-...
Autores principales: | , , , , , , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6904683/ https://www.ncbi.nlm.nih.gov/pubmed/31822679 http://dx.doi.org/10.1038/s41467-019-13371-3 |
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author | Bollani, Monica Salvalaglio, Marco Benali, Abdennacer Bouabdellaoui, Mohammed Naffouti, Meher Lodari, Mario Corato, Stefano Di Fedorov, Alexey Voigt, Axel Fraj, Ibtissem Favre, Luc Claude, Jean Benoit Grosso, David Nicotra, Giuseppe Mio, Antonio Ronda, Antoine Berbezier, Isabelle Abbarchi, Marco |
author_facet | Bollani, Monica Salvalaglio, Marco Benali, Abdennacer Bouabdellaoui, Mohammed Naffouti, Meher Lodari, Mario Corato, Stefano Di Fedorov, Alexey Voigt, Axel Fraj, Ibtissem Favre, Luc Claude, Jean Benoit Grosso, David Nicotra, Giuseppe Mio, Antonio Ronda, Antoine Berbezier, Isabelle Abbarchi, Marco |
author_sort | Bollani, Monica |
collection | PubMed |
description | Large-scale, defect-free, micro- and nano-circuits with controlled inter-connections represent the nexus between electronic and photonic components. However, their fabrication over large scales often requires demanding procedures that are hardly scalable. Here we synthesize arrays of parallel ultra-long (up to 0.75 mm), monocrystalline, silicon-based nano-wires and complex, connected circuits exploiting low-resolution etching and annealing of thin silicon films on insulator. Phase field simulations reveal that crystal faceting and stabilization of the wires against breaking is due to surface energy anisotropy. Wires splitting, inter-connections and direction are independently managed by engineering the dewetting fronts and exploiting the spontaneous formation of kinks. Finally, we fabricate field-effect transistors with state-of-the-art trans-conductance and electron mobility. Beyond the first experimental evidence of controlled dewetting of patches featuring a record aspect ratio of [Formula: see text] 1/60000 and self-assembled [Formula: see text] mm long nano-wires, our method constitutes a distinct and promising approach for the deterministic implementation of atomically-smooth, mono-crystalline electronic and photonic circuits. |
format | Online Article Text |
id | pubmed-6904683 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-69046832019-12-12 Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits Bollani, Monica Salvalaglio, Marco Benali, Abdennacer Bouabdellaoui, Mohammed Naffouti, Meher Lodari, Mario Corato, Stefano Di Fedorov, Alexey Voigt, Axel Fraj, Ibtissem Favre, Luc Claude, Jean Benoit Grosso, David Nicotra, Giuseppe Mio, Antonio Ronda, Antoine Berbezier, Isabelle Abbarchi, Marco Nat Commun Article Large-scale, defect-free, micro- and nano-circuits with controlled inter-connections represent the nexus between electronic and photonic components. However, their fabrication over large scales often requires demanding procedures that are hardly scalable. Here we synthesize arrays of parallel ultra-long (up to 0.75 mm), monocrystalline, silicon-based nano-wires and complex, connected circuits exploiting low-resolution etching and annealing of thin silicon films on insulator. Phase field simulations reveal that crystal faceting and stabilization of the wires against breaking is due to surface energy anisotropy. Wires splitting, inter-connections and direction are independently managed by engineering the dewetting fronts and exploiting the spontaneous formation of kinks. Finally, we fabricate field-effect transistors with state-of-the-art trans-conductance and electron mobility. Beyond the first experimental evidence of controlled dewetting of patches featuring a record aspect ratio of [Formula: see text] 1/60000 and self-assembled [Formula: see text] mm long nano-wires, our method constitutes a distinct and promising approach for the deterministic implementation of atomically-smooth, mono-crystalline electronic and photonic circuits. Nature Publishing Group UK 2019-12-10 /pmc/articles/PMC6904683/ /pubmed/31822679 http://dx.doi.org/10.1038/s41467-019-13371-3 Text en © The Author(s) 2019 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. |
spellingShingle | Article Bollani, Monica Salvalaglio, Marco Benali, Abdennacer Bouabdellaoui, Mohammed Naffouti, Meher Lodari, Mario Corato, Stefano Di Fedorov, Alexey Voigt, Axel Fraj, Ibtissem Favre, Luc Claude, Jean Benoit Grosso, David Nicotra, Giuseppe Mio, Antonio Ronda, Antoine Berbezier, Isabelle Abbarchi, Marco Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits |
title | Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits |
title_full | Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits |
title_fullStr | Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits |
title_full_unstemmed | Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits |
title_short | Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits |
title_sort | templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6904683/ https://www.ncbi.nlm.nih.gov/pubmed/31822679 http://dx.doi.org/10.1038/s41467-019-13371-3 |
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