A Robust Fully-Integrated Digital-Output Inductive CMOS-MEMS Accelerometer with Improved Inductor Quality Factor

This paper presents the design, fabrication, and characterization of an inductive complementary metal oxide semiconductor micro-electromechanical systems (CMOS-MEMS) accelerometer with on-chip digital output based on LC oscillators. While most MEMS accelerometers employ capacitive detection schemes,...

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Detalles Bibliográficos
Autores principales: Chiu, Yi, Liu, Hsuan-Wu, Hong, Hao-Chiao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6915362/
https://www.ncbi.nlm.nih.gov/pubmed/31752207
http://dx.doi.org/10.3390/mi10110792

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