The Analysis of the Influence of Threshold on the Dynamic Contact Process of a Fabricated Vertically Driven MEMS Inertial Switch

In this work, to evaluate the influence of the threshold on the dynamic contact process, five models (number 1, 2, 3, 4, 5) with different thresholds were proposed and fabricated with surface micromachining technology. The contact time and response time were used to characterize the dynamic contact...

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Detalles Bibliográficos
Autores principales: Chen, Wenguo, Wang, Rui, Wang, Huiying, Kong, Dejian, Sun, Shulei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6915417/
https://www.ncbi.nlm.nih.gov/pubmed/31752181
http://dx.doi.org/10.3390/mi10110791

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6915417/
https://www.ncbi.nlm.nih.gov/pubmed/31752181
http://dx.doi.org/10.3390/mi10110791

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