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Controlled Focused Ion Beam Milling of Composite Solid State Nanopore Arrays for Molecule Sensing

Various nanoscale fabrication techniques are elaborated to form artificial nanoporous/nanochannel membranes to be applied for biosensing: one of the most prevalent is the micro-electromechanical systems (MEMS) compatible focused ion beam (FIB) milling. This technique can be easily adopted in micro-...

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Detalles Bibliográficos
Autor principal:	Fürjes, Péter
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6915623/ https://www.ncbi.nlm.nih.gov/pubmed/31766129 http://dx.doi.org/10.3390/mi10110774

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