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Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

In dimensional metrology it is necessary to carry out multi-axis angle and displacement measurement for high-precision positioning. Although the state-of-the-art linear displacement sensors have sub-nanometric measurement resolution, it is not easy to suppress the increase of measurement uncertainty...

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Detalles Bibliográficos
Autores principales:	Shimizu, Yuki, Matsukuma, Hiraku, Gao, Wei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6928657/ https://www.ncbi.nlm.nih.gov/pubmed/31805630 http://dx.doi.org/10.3390/s19235289

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