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Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range
Measuring distance and thickness simultaneously is important in biological, medical, electronic, and various industries. Herein, we propose a method for simultaneously measuring the displacement and thickness of transparent materials using a pulsed terahertz wave. For this technique, a beam splitter...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6928778/ https://www.ncbi.nlm.nih.gov/pubmed/31795307 http://dx.doi.org/10.3390/s19235249 |
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author | Han, Dae-Hyun Kang, Lae-Hyong |
author_facet | Han, Dae-Hyun Kang, Lae-Hyong |
author_sort | Han, Dae-Hyun |
collection | PubMed |
description | Measuring distance and thickness simultaneously is important in biological, medical, electronic, and various industries. Herein, we propose a method for simultaneously measuring the displacement and thickness of transparent materials using a pulsed terahertz wave. For this technique, a beam splitter was used to design the optical path such that the terahertz wave would incident the specimen vertically to achieve centimeter measurement range and micrometer resolution. The measured terahertz waveform carries peak time information reflected from the upper and lower surfaces of the sample, and the thickness can be calculated using the time difference between the first and second reflected peaks. The displacement can also be calculated using peak time difference when the sample moves from the initial position to the changed position. For validation, an experimental test was performed using aluminum, acrylic, and glass plates. The results confirmed a measurement range of 1 cm with an error of less than 23 μm, and the thickness error was less than 8 μm. |
format | Online Article Text |
id | pubmed-6928778 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-69287782019-12-26 Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range Han, Dae-Hyun Kang, Lae-Hyong Sensors (Basel) Article Measuring distance and thickness simultaneously is important in biological, medical, electronic, and various industries. Herein, we propose a method for simultaneously measuring the displacement and thickness of transparent materials using a pulsed terahertz wave. For this technique, a beam splitter was used to design the optical path such that the terahertz wave would incident the specimen vertically to achieve centimeter measurement range and micrometer resolution. The measured terahertz waveform carries peak time information reflected from the upper and lower surfaces of the sample, and the thickness can be calculated using the time difference between the first and second reflected peaks. The displacement can also be calculated using peak time difference when the sample moves from the initial position to the changed position. For validation, an experimental test was performed using aluminum, acrylic, and glass plates. The results confirmed a measurement range of 1 cm with an error of less than 23 μm, and the thickness error was less than 8 μm. MDPI 2019-11-29 /pmc/articles/PMC6928778/ /pubmed/31795307 http://dx.doi.org/10.3390/s19235249 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Han, Dae-Hyun Kang, Lae-Hyong Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range |
title | Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range |
title_full | Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range |
title_fullStr | Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range |
title_full_unstemmed | Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range |
title_short | Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range |
title_sort | terahertz displacement and thickness sensor with micrometer resolution and centimeter dynamic range |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6928778/ https://www.ncbi.nlm.nih.gov/pubmed/31795307 http://dx.doi.org/10.3390/s19235249 |
work_keys_str_mv | AT handaehyun terahertzdisplacementandthicknesssensorwithmicrometerresolutionandcentimeterdynamicrange AT kanglaehyong terahertzdisplacementandthicknesssensorwithmicrometerresolutionandcentimeterdynamicrange |