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Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range

Measuring distance and thickness simultaneously is important in biological, medical, electronic, and various industries. Herein, we propose a method for simultaneously measuring the displacement and thickness of transparent materials using a pulsed terahertz wave. For this technique, a beam splitter...

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Detalles Bibliográficos
Autores principales: Han, Dae-Hyun, Kang, Lae-Hyong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6928778/
https://www.ncbi.nlm.nih.gov/pubmed/31795307
http://dx.doi.org/10.3390/s19235249
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author Han, Dae-Hyun
Kang, Lae-Hyong
author_facet Han, Dae-Hyun
Kang, Lae-Hyong
author_sort Han, Dae-Hyun
collection PubMed
description Measuring distance and thickness simultaneously is important in biological, medical, electronic, and various industries. Herein, we propose a method for simultaneously measuring the displacement and thickness of transparent materials using a pulsed terahertz wave. For this technique, a beam splitter was used to design the optical path such that the terahertz wave would incident the specimen vertically to achieve centimeter measurement range and micrometer resolution. The measured terahertz waveform carries peak time information reflected from the upper and lower surfaces of the sample, and the thickness can be calculated using the time difference between the first and second reflected peaks. The displacement can also be calculated using peak time difference when the sample moves from the initial position to the changed position. For validation, an experimental test was performed using aluminum, acrylic, and glass plates. The results confirmed a measurement range of 1 cm with an error of less than 23 μm, and the thickness error was less than 8 μm.
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spelling pubmed-69287782019-12-26 Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range Han, Dae-Hyun Kang, Lae-Hyong Sensors (Basel) Article Measuring distance and thickness simultaneously is important in biological, medical, electronic, and various industries. Herein, we propose a method for simultaneously measuring the displacement and thickness of transparent materials using a pulsed terahertz wave. For this technique, a beam splitter was used to design the optical path such that the terahertz wave would incident the specimen vertically to achieve centimeter measurement range and micrometer resolution. The measured terahertz waveform carries peak time information reflected from the upper and lower surfaces of the sample, and the thickness can be calculated using the time difference between the first and second reflected peaks. The displacement can also be calculated using peak time difference when the sample moves from the initial position to the changed position. For validation, an experimental test was performed using aluminum, acrylic, and glass plates. The results confirmed a measurement range of 1 cm with an error of less than 23 μm, and the thickness error was less than 8 μm. MDPI 2019-11-29 /pmc/articles/PMC6928778/ /pubmed/31795307 http://dx.doi.org/10.3390/s19235249 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Han, Dae-Hyun
Kang, Lae-Hyong
Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range
title Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range
title_full Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range
title_fullStr Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range
title_full_unstemmed Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range
title_short Terahertz Displacement and Thickness Sensor with Micrometer Resolution and Centimeter Dynamic Range
title_sort terahertz displacement and thickness sensor with micrometer resolution and centimeter dynamic range
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6928778/
https://www.ncbi.nlm.nih.gov/pubmed/31795307
http://dx.doi.org/10.3390/s19235249
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